High-speed microfabricated silicon turbomachinery and fluid...

Journal of Microelectromechanical Systems 2005 / 02 Vol. 14; Iss. 1

High-speed microfabricated silicon turbomachinery and fluid film bearings

Frechette, L.G., Jacobson, S.A., Breuer, K.S., Ehrich, F.F., Ghodssi, R., Khanna, R., Chee Wei Wong,, Xin Zhang,, Schmidt, M.A., Epstein, A.H.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2004.839008
Date:
February, 2005
File:
PDF, 3.00 MB
english, 2005
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