[IEEE 2010 Silicon Nanoelectronics Workshop (SNW) - Honolulu, HI, USA (2010.06.13-2010.06.14)] 2010 Silicon Nanoelectronics Workshop - Novel Ni germanide technology with co-sputtering of Ni and Pt for thermally stable Ge MOSFETs on Ge-on-Si substrate
Kang, Min-Ho, Oh, Se-Kyung, Shin, Hong-Sik, Yoo, Jung-Ho, Lee, Ga-Won, Wang, Jin-Suk, Oh, Jung-Woo, Majhi, Prashant, Jammy, Raj, Lee, Hi-DeokYear:
2010
Language:
english
DOI:
10.1109/snw.2010.5562558
File:
PDF, 1.06 MB
english, 2010