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An Investigation of the Effect of Elastic Constants of Spacer in n-FETs CESL Stressor
Chien-Chao Huang,, Hao-Yu Chen,, Hung-Keng Chen,, Sanboh Lee,Volume:
31
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2010.2048191
Date:
July, 2010
File:
PDF, 229 KB
english, 2010