![](/img/cover-not-exists.png)
[IEEE ESSDERC 2008 - 38th European Solid-State Device Research Conference - Edinburgh, UK (2008.09.15-2008.09.19)] ESSDERC 2008 - 38th European Solid-State Device Research Conference - A Study on aggressive proximity of embedded SiGe with comprehensive SDE engineering for 32 nm-node high-performance pMOSFET technology
Okamoto, H., Yasutake, N., Kusunoki, N., Adachi, K., Itokawa, H., Miyano, K., Ishida, T., Hokazono, A., Kawanaka, S., Mizushima, I., Azuma, A., Toyoshima, Y.Year:
2008
Language:
english
DOI:
10.1109/essderc.2008.4681764
File:
PDF, 548 KB
english, 2008