[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - Degradation of reliability of high-k gate dielectrics caused by point defects and residual stress
Hideo Miura,, Ken Suzuki,, Toru Ikoma,, Seiji Samukawa,, Hideki Yoshikawa,, Shigenori Ueda,, Yoshiyuki Yamashita,, Keisuke Kobayashi,Year:
2008
Language:
english
DOI:
10.1109/relphy.2008.4559002
File:
PDF, 249 KB
english, 2008