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[IEEE 2008 IEEE/SICE International Symposium on System Integration - Nagoya, Japan (2008.12.4-2008.12.4)] 2008 IEEE/SICE International Symposium on System Integration - Optimal PID Control System of a Piezoelectric Microospitioner
Shieh, Hsin-Jang, Chiu, Yun-Jen, Chen, Yen-TingYear:
2008
Language:
english
DOI:
10.1109/si.2008.4770417
File:
PDF, 4.80 MB
english, 2008