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[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A novel thermal switch design by using CMOS MEMS fabrication process
Chou, Lei-Chun, Lai, You-Liang, Juang, Ying-Zong, Tsai, Chun-Yin, Lin, Chun-Ying, Huang, Sheng-Chieh, Chiou, Jin-ChernYear:
2011
Language:
english
DOI:
10.1109/nems.2011.6017332
File:
PDF, 873 KB
english, 2011