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[IEEE 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Daerah Langkawi, Malaysia (2013.09.25-2013.09.27)] RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics - Physical properties of tin oxide thin films deposited using magnetron sputtering technique
Lim, Huey Sia, Nayan, Nafarizal, Sahdan, Mohd Zainizan, Dahlan, Samsul Haimi, Suaidi, Mohd Kadim, Johar, Fauzi Mohd, Kiani, Ghaffer I.Year:
2013
Language:
english
DOI:
10.1109/rsm.2013.6706549
File:
PDF, 502 KB
english, 2013