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[IEEE 2005 International Conference On Simulation of Semiconductor Processes and Devices - Tokyo, Japan (2005.09.3-2005.09.3)] 2005 International Conference On Simulation of Semiconductor Processes and Devices - Integrated Simulation Flow for Self-Consistent Manufacturability and Circuit Performance Evaluation
Shibkov, A., Axelrad, V.Year:
2005
Language:
english
DOI:
10.1109/sispad.2005.201489
File:
PDF, 1.89 MB
english, 2005