Synthesis and characterization of SiC:H ultrafine powder generated in an argon–silane–methane low-pressure radio-frequency discharge
Vivet, F., Bouchoule, A., Boufendi, L.Volume:
83
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.367510
File:
PDF, 647 KB
english, 1998