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[IEEE 2013 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC) - Hong Kong, Hong Kong (2013.06.3-2013.06.5)] 2013 IEEE International Conference of Electron Devices and Solid-state Circuits - Fabrication of monolithic integrated MEMS resonator with wet-release-monitoring array
Danqi Zhao,, Jun He,, Xian Huang,, Li Zhang,, Fang Yang,, Dacheng Zhang,Year:
2013
Language:
english
DOI:
10.1109/edssc.2013.6628207
File:
PDF, 696 KB
english, 2013