[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A Wet Etching Post-process for CMOS-MEMS RF Switches
Dai, Ching-Liang, Liu, Mao-ChenYear:
2007
Language:
english
DOI:
10.1109/nems.2007.352179
File:
PDF, 4.19 MB
english, 2007