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Influence of negative ion resputtering on ZnO:Al thin films
Rieth, Loren W., Holloway, Paul H.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1626641
File:
PDF, 615 KB
english, 2004