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[IEEE International Electron Devices Meeting - Washington, DC, USA (10-13 Dec. 1995)] Proceedings of International Electron Devices Meeting - A low-voltage bulk-silicon tunneling-based microaccelerometer
Chingwen Yeh,, Najafi, K.Year:
1995
Language:
english
DOI:
10.1109/iedm.1995.499291
File:
PDF, 604 KB
english, 1995