Plasma-polymer interactions: A review of progress in...

Plasma-polymer interactions: A review of progress in understanding polymer resist mask durability during plasma etching for nanoscale fabrication

Oehrlein, Gottlieb S., Phaneuf, Raymond J., Graves, David B.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3532949
File:
PDF, 2.40 MB
english, 2011
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