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Mechanical Properties of Thin Free-Standing CYTOP Membranes
Fong, Norman R, Berini, Pierre, Tait, R NiallVolume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2047633
Date:
June, 2010
File:
PDF, 544 KB
english, 2010