![](/img/cover-not-exists.png)
Growth Behavior of Atomic-Layer-Deposited Pb(Zr,Ti)O[sub x] Thin Films on Planar Substrate and Three-Dimensional Hole Structures
Watanabe, Takayuki, Hoffmann-Eifert, Susanne, Hwang, Cheol Seong, Waser, RainerVolume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2977717
File:
PDF, 969 KB
english, 2008