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Characterization of plasma ion source utilizing anode spot with positively biased electrode for stable and high-current ion beam extraction
Park, Yeong-Shin, Lee, Yuna, Chung, Kyoung-Jae, Hwang, Y. S.Volume:
82
Year:
2011
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3664616
File:
PDF, 1.41 MB
english, 2011