![](/img/cover-not-exists.png)
Sustainable treatment of HF wastewaters from semiconductor industry with a fluidized bed reactor
Van den Broeck, K., Van Hoornick, N., Van Hoeymissen, J., de Boer, R., Giesen, A., Wilms, D.Volume:
16
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2003.815624
Date:
August, 2003
File:
PDF, 490 KB
english, 2003