Process Development for CMOS-MEMS Sensors With Robust Electrically Isolated Bulk Silicon Microstructures
Hongwei Qu,, Huikai Xie,Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.906079
Date:
October, 2007
File:
PDF, 1.14 MB
english, 2007