[IEEE 27th Annual Proceedings., International Reliability...

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[IEEE 27th Annual Proceedings., International Reliability Physics Symposium - Phoenix, AZ, USA (11-13 April 1989)] 27th Annual Proceedings., International Reliability Physics Symposium - Angled implant fully overlapped LDD (AI-FOLD) NFETs for performance and reliability

Bryant, A., Furukawa, T., Mandelman, J., Mittl, S., Noble, W., Nowak, E., Wade, W., Ogura, S., Wordeman, M.
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Year:
1989
Language:
english
DOI:
10.1109/relphy.1989.36337
File:
PDF, 457 KB
english, 1989
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