Scanning probes in nanostructure fabrication

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 11 Vol. 32; Iss. 6

Scanning probes in nanostructure fabrication

Kaestner, Marcus, Ivanov, Tzvetan, Schuh, Andreas, Ahmad, Ahmad, Angelov, Tihomir, Krivoshapkina, Yana, Budden, Matthias, Hofer, Manuel, Lenk, Steve, Zoellner, Jens-Peter, Rangelow, Ivo W., Reum, Alex
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4897500
Date:
November, 2014
File:
PDF, 4.15 MB
english, 2014
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