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[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - CMOS-MEMS post processing compatible capacitively transduced GeSi resonators
Kazmi, Syed Naveed Riaz, Aarnink, Tom, Salm, Cora, Schmitz, JurriaanYear:
2012
Language:
english
DOI:
10.1109/fcs.2012.6243633
File:
PDF, 1.25 MB
english, 2012