[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Investigation of Intrinsic Stress Effects in Cantilever Structures
Hollauer, Ch., Ceric, H., van Barel, G., Witvrouw, A., Selberherr, S.Year:
2007
Language:
english
DOI:
10.1109/nems.2007.352250
File:
PDF, 698 KB
english, 2007