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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - An object-oriented material-property database architecture for microelectromechanical CAD
Shulman, M.A., Ramaswamy, M., Heytens, M.L., Senturia, S.D.Year:
1991
DOI:
10.1109/sensor.1991.148918
File:
PDF, 251 KB
1991