[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - Solid state reactions and barrier properties of the thin films Ti-W on the silicon
Makogon, Yu.N., Maximovich, L.P., Sidorenko, S.A.Year:
1998
Language:
english
DOI:
10.1109/mam.1998.887573
File:
PDF, 61 KB
english, 1998