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[IEEE 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - San Francisco, CA, USA (6-8 Oct. 1997)] 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) - Behaviour of COPs (pits) on substrate surface during growth of thin epitaxial layer-condition of survival as pits on epi surface
Kimura, M., Shinyashiki, H., Shimanuki, Y.Year:
1997
Language:
english
DOI:
10.1109/issm.1997.664594
File:
PDF, 374 KB
english, 1997