[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Mass flowmeter using a multi-sensor chip
Yong Xu,, Chen-Wei Chiu,, Fukang Jiang,, Qiao Lin,, Yu-Chong Tai,Year:
2000
Language:
english
DOI:
10.1109/memsys.2000.838575
File:
PDF, 536 KB
english, 2000