[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (Jan. 30 - Feb. 3, 2005)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Micro proximity electronsource for nanoprocessing in atmosphere
Wonje Choi,, Ono, T.-a., Phan Ngoc Minh,, Esashi, M.Year:
2005
Language:
english
DOI:
10.1109/memsys.2005.1454069
File:
PDF, 685 KB
english, 2005