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Real time optical characterization of gas flow dynamics in high-pressure chemical vapor deposition
Woods, Vincent, Born, Harald, Strassburg, Martin, Dietz, NikolausVolume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1705589
File:
PDF, 752 KB
english, 2004