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Study on surface reaction of (Ba, Sr)TiO[sub 3] thin films by high density plasma etching
Kim, Seung-Bum, Kim, Chang-Il, Chang, Eui-Goo, Yeom, Geun-YoungVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581742
File:
PDF, 393 KB
english, 1999