High energy electron fluxes in dc-augmented capacitively...

High energy electron fluxes in dc-augmented capacitively coupled plasmas I. Fundamental characteristics

Wang, Mingmei, Kushner, Mark J.
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Volume:
107
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3290870
File:
PDF, 1.58 MB
english, 2010
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