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Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations
Drüsedau, Tilo P., Bock, Torsten, John, Thomas-Maik, Klabunde, Frank, Eckstein, WolfgangVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581957
File:
PDF, 453 KB
english, 1999