Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2007 Vol. 25; Iss. 3
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Fabrication of GaN suspended photonic crystal membranes and resonant nanocavities on Si(111)
Rosenberg, A., Bussmann, K., Kim, Mijin, Carter, Michael W., Mastro, M. A., Holm, Ronald T., Henry, Richard L., Caldwell, Joshua D., Eddy, Charles R.Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2723750
File:
PDF, 509 KB
english, 2007