Model of plasma source ion implantation in planar,...

Journal of Applied Physics 1990 Vol. 67; Iss. 3

Model of plasma source ion implantation in planar, cylindrical, and spherical geometries

Scheuer, J. T., Shamim, M., Conrad, J. R.
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Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.345722
File:
PDF, 724 KB
english, 1990
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