Ohmic contacts in AlSb/InAs high electron mobility...

Ohmic contacts in AlSb/InAs high electron mobility transistors for low-voltage operation

Boos, J. B., Bennett, B. R., Kruppa, W., Park, D., Mittereder, J., Bass, R., Twigg, M. E.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590687
File:
PDF, 631 KB
english, 1999
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