![](/img/cover-not-exists.png)
[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out
Groenesteijn, J., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J., Krijnen, G. J. M.Year:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765736
File:
PDF, 4.35 MB
english, 2014