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Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
Senez, Vincent, Armigliato, Aldo, De Wolf, Ingrid, Carnevale, Gianpietro, Balboni, Roberto, Frabboni, Stefano, Benedetti, AlessandroVolume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1611287
File:
PDF, 700 KB
english, 2003