(Ti1−xAlx)N coatings by plasma-enhanced chemical vapor...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1994 / 7 Vol. 12; Iss. 4

(Ti1−xAlx)N coatings by plasma-enhanced chemical vapor deposition

Lee, Sang-Hyeob
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.579362
Date:
July, 1994
File:
PDF, 807 KB
english, 1994
Conversion to is in progress
Conversion to is failed