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[IEEE 2007 International Semiconductor Device Research Symposium - College Park, MD, USA (2007.12.12-2007.12.14)] 2007 International Semiconductor Device Research Symposium - Effects of oxygen content on the structural and sensing properties of Y203 sensing membrane for pH-ISFET application
Tung-Ming Pan,, Kao-Ming Liao,, Li-Chen Yen,, Yu-Yi Hsieh,, Yue-Zhang Chen,Year:
2007
Language:
english
DOI:
10.1109/ISDRS.2007.4422250
File:
PDF, 271 KB
english, 2007