![](/img/cover-not-exists.png)
Impact of the transient formation of molecular hydrogen on the microcrack nucleation and evolution in H-implanted Si (001)
Personnic, S., Bourdelle, K. K., Letertre, F., Tauzin, A., Cherkashin, N., Claverie, A., Fortunier, R., Klocker, H.Volume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2829807
File:
PDF, 1.45 MB
english, 2008