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Patterning of highly oriented pyrolytic graphite by oxygen plasma etching
Lu, Xuekun, Huang, Hui, Nemchuk, Nikolay, Ruoff, Rodney S.Volume:
75
Year:
1999
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.124316
File:
PDF, 542 KB
english, 1999