Comparison of the stability of hot and cold cathode...

Comparison of the stability of hot and cold cathode ionization gauges

Li, Detian, Jousten, Karl
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Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1578654
File:
PDF, 410 KB
english, 2003
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