Amorphous silicon layer characteristics during 70–2000 eV...

Amorphous silicon layer characteristics during 70–2000 eV Ar[sup +]-ion bombardment of Si(100)

Stevens, A. A. E., Kessels, W. M. M., van de Sanden, M. C. M., Beijerinck, H. C. W.

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Volume:

Year:

2006

Language:

english

Journal:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

DOI:

10.1116/1.2244535

File:

PDF, 417 KB

english, 2006

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