Overlay Error Compensation Using Advanced Process Control...

IEEE Transactions on Automation Science and Engineering 2014 / 04 Vol. 11; Iss. 2

Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller

Chien, Chen-Fu, Chen, Ying-Jen, Hsu, Chia-Yu, Wang, Hung-Kai
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Volume:
11
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/tase.2013.2280618
Date:
April, 2014
File:
PDF, 1.71 MB
english, 2014
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