Mechanical properties of titanium nitride coatings deposited by inductively coupled plasma assisted direct current magnetron sputtering
Lim, Ju-Wan, Park, Heung-Sik, Park, Tae-Hyeong, Lee, Jung-Joong, Joo, JunghoonVolume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582219
File:
PDF, 1.03 MB
english, 2000