The role of carbon on the electrical properties of...

Journal of Applied Physics 2001 Vol. 90; Iss. 12

The role of carbon on the electrical properties of polycrystalline Si[sub 1−y]C[sub y] and Si[sub 0.82−y]Ge[sub 0.18]C[sub y] films

Anteney, I. M., Parker, G. J., Ashburn, P., Kemhadjian, H. A.
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Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1343896
File:
PDF, 359 KB
english, 2001
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