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Metalorganic chemical vapor deposition on mesoscopic-structured substrates with closed topologies
Ishibashi, Akira, Ogawa, Masamichi, Funato, Kenji, Ugajin, Ryuichi, Mori, YoshifumiVolume:
70
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.349448
File:
PDF, 1.07 MB
english, 1991