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Fabrication of dry etched CdZnSe/ZnSe quantum wires by thermally assisted electron cyclotron resonance etching
T. Kümmell, G. Bacher, A. Forchel, J. Nürnberger, W. Faschinger, G. Landwehr, B. Jobst, D. HommelYear:
1997
Language:
english
DOI:
10.1063/1.119533
File:
PDF, 478 KB
english, 1997