![](/img/cover-not-exists.png)
[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - On the determination of poisson’s ratio of stressed monolayer and bilayer submicron thick films
Martins, P., Malhaire, C., Brida, S., Barbier, D.Year:
2008
Language:
english
DOI:
10.1109/dtip.2008.4752983
File:
PDF, 1.49 MB
english, 2008